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Specification and model
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LD-600S（A.B）
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Vacuum Chamber Inner Size
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¢500-700×h500-700(mm)
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Effective coating space
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¢400-600×h350-550(mm)
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Vacuum chamber material
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304 stainless steel
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Vacuum chamber material thickness
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Inner 8mm outer 3mm
Interlayer water cooling pipes
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Vacuum chamber inner lining
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ouble-layer stainless steel of inner liningδ0.8m
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Vacuum Chamber door
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Cut Gate Net thickness of door frame≧28mm Hinge
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structure heat-resistant temperature
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≤500℃
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Work piece rotary frame
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Rotation + revolution and rotation
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Quantity of the hanging rod
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Can design according to the workpiece qu
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The layout of the rotary frame
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The top of Vacuum Chamber downward install
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Turntable material
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gear carbon steel electroplating
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Hanging a turntable spindle seal
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Magnetic fluid seal Or Oil seal
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Rotary speed
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0-5revolutions/minute（rotation）speed governor adjus
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The maximum size of the workpiece
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¢80-120×h350-500(mm)
rotation
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Application
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Tools coating+Decorative coating
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Work piece material
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Metal, glass, ceramics, etc.
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Film materia
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TiN TiAlN CrN TiC TiCN etc.
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Color coating layer can be
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Gold、 Silver、Purplish black、 Brown、Black、Blue、 Rainbow 、 etc-
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Requirement of production space
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5×7m
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Requirement of capacitance
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50Hz 380V 40KVA
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Electricity production
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≤25KW/小时
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Requirement of cooling wate
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≧3ton/hour circulating cooling water/ 25℃
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cooling water pressure
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3-5kg
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Pollutant emission
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none
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Work noise
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≤90decibel
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Vacuum air pump
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2X-70rough
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Maintain pump
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2X-30 Rotary vane pumps
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Roots pump
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ZJP-150
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Diffusion pump
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KT-400
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Ultimate vacuum
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Overmatch 6×10-4 Pa
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Work vacuum
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6.67×10¯3 Pa
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Exhaust speed
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<20 minutes(atmosphere—work vacuum)
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Pressure rising rate(leak rate)
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≤0.35Pa/h
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Coating the heating temperature
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Common 350-430℃
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Temperature control
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PID smart temperature control
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Rotary frame material
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6 dynamoelectric striking the arc indirect cooling
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Minimum stable arc current
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30A
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Target size
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¢100×40(mm)
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Grid bias power supply
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20KW 20KHz Inverter power supply
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Voltaic arc power supply
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6 0-200A electric current tunable
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Coating chamber heating power
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15KW Heating tube heating
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Vacuum Measurement
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3 measuring point wide-range compound vacuum gauge
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Gas Mass Flow Meter
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4gas mass flow controller
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Gas Flow Control
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Four-way adjustable gas flow figures
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System control
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6 way pneumatic valve.
Safety interlock
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Air operated barometric pressure source
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General air compressor
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Coating System control
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Voltage Display Current Regulator Automatic recovery
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Water distribution
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Water pressure directed The waterways of independent switches
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Exhaust pipes and valves
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High vacuum valve Separate ways valve、 Electrical Tape valve
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Control cabinet and cables
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Input and output cables and other power distribution terminal row
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Alarm System
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Water phase without water break alarm
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shutdown System
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E-stop+ Electric control cabinet + Delay Shutdown
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Coating Operation Process
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8-10 kinds of tools for supporting coating processes
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Control mode
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Automatic(A)
Manually operation(B)
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Automatic control system (A)
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Industry control
computer+PLD+LCD+printer
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Accessories
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A titanium target、A full set of seals, etc.
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Train
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Two skilled operators
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Warranty
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One-year warranty、Lifetime Service
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Delivery period
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2.5 months
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