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Specification and model
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LD-620S（A.B）
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Vacuum Chamber Inner Size
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¢800-900×h800-900(mm)
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Effective coating space
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¢700-800×h600-700(mm)
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Vacuum chamber material
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304stainless steel
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Vacuum chamber material thickness
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Inner 8mm outer 3mm
Interlayer water cooling pipes
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Vacuum chamber inner lining
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double-layer stainless steel of inner liningδ0.8mm
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Vacuum Chamber door
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Cut Gate Net thickness of door frame≧28mm Hinge
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Sputtering rake installation door
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Bilaterians open on both sides of the vacuum chamber
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Sputtering rake baffle
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Stainless steel movable sputtering target platens
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structure heat-resistant temperature
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≤500℃
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Work piece rotary frame
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Rotation + revolution and rotation
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Quantity of the hanging rod
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Can design according to the workpiece quantity
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The layout of the rotary frame
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The top of Vacuum Chamber downward install
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Turntable material
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gear carbon steel electroplating
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Hanging a turntable spindle seal
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Magnetic fluid seal Or Oil seal
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Rotary speed
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0-5revolutions/minute（rotation）speed governor adjust
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The maximum size of the workpiece
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¢80-12×h350-500(mm)rotation
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Application
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Tools coating +Decorative coating
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Work piece material
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Metal, glass, ceramics, plastics etc.
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Film material
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TiN TiAlN CrN TiC TiCN etc
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Color coating layer can be
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Gold、 Silver、Purplish black、 Brown、Black、Blue、 Rainbow 、 etc-
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Requirement of production space
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5×7m
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Requirement of capacitance
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50Hz 380V 50KVA
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Electricity production
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≤30KW/H
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Requirement of cooling water
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≧3ton/hour circulating cooling water/ 25℃
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cooling water pressure
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3-5KG
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Pollutant emission
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none
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Work noise
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≤90decibel
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Vacuum air pump
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2X-70Rotary vane pumps
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Maintain pump
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2X-30Rotary vane pumps
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Roots pump
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ZJP-150
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Diffusion pump
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KT-400
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Ultimate vacuum
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Overmatch6×10¯4 Pa
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Work vacuum
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6.67×10¯3 Pa
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Exhaust speed
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<20 minutes(atmosphere—work vacuum)
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Pressure rising rate(leak rate)
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≤0.35Pa/h
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Coating the heating temperature
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Common 350-430℃
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Temperature control
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PID smart temperature control
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Rotary frame material
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6 dynamoelectric striking the arc indirect cooling
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Minimum stable arc current
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30A
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Target size
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¢100×40(mm)
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Grid bias power supply
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20KW 20KHz Inverter power supply
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Voltaic arc power supply
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6 0-200A electric current tunable
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Magnetron sputtering rake
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Rectangular symmetric 2 non-equilibrium directly to the cooling
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the size of the sputtering
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w150×h650-750(mm)
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The size of the sputtering rake thin
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w100×h600-700×δ12 (mm)
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Magnetron sputtering power
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Intermediate frequency pulse：
40KHz power ：30KW
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Target layout
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The furnace door and vent symmetry
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Coating chamber heating power
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15KW Heating tube heating
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Vacuum Measurement
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3 measuring point wide-range compound vacuum gauge
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Gas Mass Flow Meter
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4gas mass flow controller
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Gas Flow Control
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Four-way adjustable gas flow figures
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Vacuum chamber distribution gas
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Four posts close to furnace wall evenly distributed
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System control
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6 way pneumatic valve.
Safety interlock
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Air operated barometric pressure source
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General air compressor
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Coating System control
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Voltage Display Current Regulator Automatic recovery
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Water distribution
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Water pressure directed The waterways of independent switches
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Exhaust pipes and valves
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High vacuum valve Separate ways valve
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Control cabinet and cables
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Input and output cables and other power distribution terminal row
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Alarm System
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Water phase without water break alarm
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Shutdown System
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E-stop+ Electric control cabinet + Delay Shutdown
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Coating Operation Process
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8-10 kinds of tools for supporting coating processes
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Control mode
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Automatic(A)
Manually operation(B)
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Automatic control system
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Computer+ PLD+ LCD+ printer
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Accessories
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A titanium target、A full set of seals, etc.
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Train
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Two skilled operators
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Warranty
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One-year warranty、Lifetime Service
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Delivery period
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2.5 months
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