Vacuum magnetron sputtering ion coating equipment
The major difference with the multiple arc coating machine :
Adding plane non-equilibrium magnetron sputtering target ,
it can not only expand the workpieces species and rang ,
but also make the plating system of membrane layer more
exquisite and compact and improved the clarity and appearance
quality of the membrane layer. Mostly ,we can dope gold silver platinum
and other precious metals and silicon, tungsten, molybdenum etc rare elements in traditional coating .
This greatly improved the physicochemical properties of membrane layer
and make coating quality obtain significantly increased .
Main application fields of the equipment :
Tools and dies:drill head, milling cutter, lathe knife, reamer, hobbling cutter, broaching tool, screw tap,
plunger chip, die, extruding die, stamping die, measuring tool, cutting tool, shaft bearing, textile,
medical apparatus and instrument, hardware, automobile fitting parts and so on.
Consumer goods: glass, ceramic, sanitary ware, cultural ware, clock, watch, glasses, light fitting,
Locket, tableware, jewelry, mobile phone, home appliance, apparatus, meter, metal decoration,
hairdressing tool, decorations for all kinds of structures and so on.
Plastics:PVC , ABS , PP , PS and so on .
A----Computer automatic control B---- Switch board manual LD----Ion coating
C---- Magnetron sputtering X20---- Two magnetron sputtering target S---- Tool type coating equipment
Specification and model
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LD-C820(A.B)
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Vacuum Chamber Inner Size
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¢800-900×h800-900(mm)
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Effective coating space
|
¢00-800×h600-700(mm)
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Vacuum chamber material
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304stainless steel
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Vacuum chamber material thickness
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Inner 8mm outer 3mm
Interlayer water cooling pipes
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Vacuum chamber inner lining
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double-layer stainless steel of inner liningδ0.8mm
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Vacuum Chamber door
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Cut Gate Net thickness of door frame≧28mm Hinge
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Sputtering rake installation door
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Bilaterians open on both sides of the vacuum chamber
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Sputtering rake baffle
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Stainless steel movable sputtering target platens
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structure heat-resistant temperature
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≤500℃
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Work piece rotary frame
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Rotation + revolution and rotation
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Quantity of the hanging rod
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Can design according to the workpiece quantity
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The layout of the rotary frame
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The top of Vacuum Chamber downward install
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Turntable materia
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gear carbon steel electroplating
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Hanging a turntable spindle seal
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Magnetic fluid seal Or Oil seal
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Rotary speed
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0-5revolutions/minute(rotation)speed governor adjust
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The maximum size of the workpiece
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¢120-10×h600-800(mm)
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Application
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Tools coating +Decorative coating
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Work piece material
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Metal, glass, ceramics
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Film materia
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TiN TiAlN CrN TiC TiCN etc.
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Color coating layer can be
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Gold、 Silver、Purplish black、 Brown、Black、Blue、 Rainbow 、 etc
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Requirement of production space
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7×8m
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Requirement of capacitance
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50Hz 380V 70KVA
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Electricity production
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≤40KW/H
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Requirement of cooling wate
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≧3on/hour circulating cooling water/ 25℃
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cooling water pressure
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3-5KG
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Pollutant emission
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none
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Work noise
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≤90decibel
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Vacuum air pump
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2X-70Rotary vane pumps
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Maintain pump
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2X-30Rotary vane pumps
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Roots pump
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ZJP-150
|
Diffusion pump
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KT-400
|
Ultimate vacuum
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Overmatch6×10¯4 Pa
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Work vacuum
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6.67×10¯3 Pa
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Exhaust speed
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<20minutes(atmosphere—work vacuum)
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Pressure rising rate(leak rate)
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≤0.35Pa/h
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Coating the heating temperature
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Common 350-430℃
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Temperature control
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PID smart temperature control
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Grid bias power supply
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35KW 20KHz Inverter power supply
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Magnetron sputtering rak
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Rectangular symmetric 2 non-equilibrium directly to the cooling
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the size of the sputtering
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w150×h850-1050(mm)
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The size of the sputtering rake thin
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w100×h800-1000×δ12(mm)
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Center columnar sputtering target
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Two Center columnar sputtering targets
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Columnar target structure
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Target materials rotating
Crucial directional target
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Size of columnar sputtering target
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¢70×h750-850(mm)
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Magnetron sputtering power
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Intermediate frequency pulse: 40KHz power:35KW
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Plane target layout
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The furnace door and vent
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Columnar target layout
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Vacuum chamber center
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Coating chamber heating power
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20KW Heating tube heating
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Vacuum Measurement
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3 measuring point wide-range compound vacuum gauge
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Gas Mass Flow Meter
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4gas mass flow controller
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Gas Flow Control
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Four-way adjustable gas flow figures
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Vacuum chamber distribution gas
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Four posts close to furnace wall evenly distributed
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System control
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6 way pneumatic valve.
Safety interlock
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Air operated barometric pressure source
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General air compressor
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Coating System control
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Voltage Display Current Regulator Automatic recovery
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Water distribution
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Water pressure directed The waterways of independent switches
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Exhaust pipes and valves
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High vacuum valve Separate ways valve
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Control cabinet and cables
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Input and output cables and other power distribution terminal row
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Alarm System
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Water phase without water break alarm
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Shutdown System
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E-stop+ Electric control cabinet + Delay Shutdown
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Coating Operation Process
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8-10 kinds of tools for supporting coating processes
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Control mode
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Automatic(A)
Manually operation(B)
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Automatic control syste
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Computer+ PLD+ LCD+ printer
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Accessories
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A titanium target、A full set of seals, etc.
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Train
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Two skilled operators
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Warranty
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One-year warranty、Lifetime Service
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Delivery period
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2.5 months
|
Note:
Ion source and power should be added as for tools coating
The red words express the plane magnetron sputtering target is installed
The blue words express columnar magnetron sputtering target is installed